Sedov, V.; Khomich, A.; Ralchenko, V.; Martyanov, A.; Savin, S.; Poklonskaya, O.; Trofimov, N. Growth of Si-Doped Polycrystalline Diamond Films on AlN Substrates by Microwave Plasma Chemical Vapor Deposition. J. Coat. Sci. Technol. 2021, 2, 38-45.