Sedov, V., Khomich, A., Ralchenko, V., Martyanov, A., Savin, S., Poklonskaya, O. and Trofimov, N. 2021. Growth of Si-Doped Polycrystalline Diamond Films on AlN Substrates by Microwave Plasma Chemical Vapor Deposition. Journal of Coating Science and Technology. 2, 2 (Jul. 2021), 38–45. DOI:https://doi.org/10.6000/2369-3355.2015.02.02.1.